Control of duty ratio in waveguide gratings using a Near-Field Holographic lithography system with a variable aperture

Control of duty ratio in waveguide gratings using a Near-Field Holographic lithography system with a variable aperture
제목
Control of duty ratio in waveguide gratings using a Near-Field Holographic lithography system with a variable aperture
제목 (타언어)
Control of duty ratio in waveguide gratings using a Near-Field Holographic lithography system with a variable aperture
저자
O BEOM HOAN
학회명
33rd International Conference on Micro-and nano-Engineering 2007