Nano optical lithography를 위한 bow tie-shaped nano-aperture의 최적 설계 및 분석

초록

In this paper, we proposed a bow tie-shaped nano-aperture which has extremely high transmission efficiency and can produce very small beam spot. The structure was designed using the resonance phenomenon of the surface plasmon, so that it can concentrate surface plasmon to the sharp apex of the aperture. We used dispersive FDTD method to find out optimal resonance condition and could obtain the electric field enhancement of about 12000 times and the beam spot size of 28nm X 26nm under the optimal resonance condition.