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Effect of DC Biases on the Nanostructural and Physical Properties of nc-Si:H Films Prepared by PECVD

  • CHO NAMHEE
제목
Effect of DC Biases on the Nanostructural and Physical Properties of nc-Si:H Films Prepared by PECVD
저자
CHO NAMHEE
학회명
3rd International Conference on Surfaces, Coatings and Nanostructured Materials
개최지
Barcelona, Spain
학회 개최일
2008-10-21 ~ 2008-10-24

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