Pb1-xLaxTi1-x/4O3 (x=0.1) (PLT(10)) 강유전체 박막에서 동적 초전특성의 주파수 의존성에 관한 연구

초록

The fabricated La-modified lead titanate (PLT) thin film without poling treatment was investigated for modulation frequency dependence of pyroelectric properties by the dynamic method. Pb1-xLaxTi1-x/4O3 PLT(x=0.1) thin film having 10mol% La content was deposited on a Pt/TiOx/SiO2/Si substrate by sol-gel method. The PLT(10) thin film exhibits a relatively excellent dielectric property. The pyroelectric coefficient (p) of the PLT(10) thin film is 6.6X10-9C/cm2K without frequency dependence. The figure of merits for the voltage responsivity annd specific detectivity are 1.03X10-11Ccm/J and 1.46X10-9Ccm/J, respectively. The PLT(10) thin film has voltage responsivity (Rv) of 5.15V/W at 8Hz. Noise equivalent power (NEP) and specific detectivity (D*) of the PLT(10) thin film are 9.93X10-8W/Hz1/2 and 1.81X106cmHz1/2/W at the same frequency of 100Hz, respectively. The results means that PLT thin film having 10mol% La content is suitable for the sensing materials of pyroelectric IR sensors.