Facile Fabrication Method for Broadband Al Wire Grid Polarizers Using Nanoimprint Lithography and Oblique Angle Deposition

초록

A facile route to the fabrication of a broadband Al wire grid polarizer (WGP) was demonstrated using nanoimprint lithography (NIL) and oblique angle deposition (OAD) methods. An Al film with the desired shape for a 1D grating pattern was formed by OAD directly on the top of a polymer nanostructure, which was patterned by NIL as a substrate at a pitch of 120 nm, width of 50 nm and height of 160 nm. The results show that transmittance of the transverse magnetic wave for the fabricated WGP was an average of 67% and the average polarization extinction ratio was 22 dB in the visible and near infrared wavelength regime. The optical properties of the various shapes of Al patterns on the 1D polymer nanostructures were also simulated using a rigorous finite difference time domain simulation. This work can open up a cost-effective fabrication method for high- performance and large-area WGPs.

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