마이크로파 유전특성에 영향을 주는 세라믹내의 결정화유리

초록

The low temperature co-fired ceramic (LTCC) technology is a multi-layer ceramic process that can be used to fabricate low cost, high performance RF and microwave components. Therefore, the materials for application for LTCC are needed. The LTCC technology demand of lowering the sintering temperature Tsint<900℃ of the dielectric materials using low melted electrode materials a such as silver (Tm : 961℃). In this study, ceramics in the system BaO-Nd2O3-TiO2 (BNT:40-80wt%) and rare earth derived borate glass (LBT:60-20wt%, 1.5-106㎛) were prepared. The glass/ceramic composites were evaluated for sintering behavior, phase evaluation, densities, interface reaction and microwave dielectric properties. It was found that the addition LBT glass frits significantly lowered the sintering temperature to below 900℃ and as temperature increased (750 - 900℃) densification developed rapidly which was meant to be as over 95% of relative density. The sintered bodies represented applicable dielectric properties, namely 20~40 for εr, ~10000 GHz for Q*f0. The results suggest that controlling the contents of glass frits is crucial to facilitate the sintering process and increase the dielectric properties at low sintering temperature.