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Etch of Sub-Micron High Aspect Ratio Holes in a Bilayer of SU-8/PMMA Resist Stack for Photonic Crystal Devices
Etch of Sub-Micron High Aspect Ratio Holes in a Bilayer of SU-8/PMMA Resist Stack for Photonic Crystal Devices
- 제목
- Etch of Sub-Micron High Aspect Ratio Holes in a Bilayer of SU-8/PMMA Resist Stack for Photonic Crystal Devices
- 제목 (타언어)
- Etch of Sub-Micron High Aspect Ratio Holes in a Bilayer of SU-8/PMMA Resist Stack for Photonic Crystal Devices
- 저자
- O BEOM HOAN
- 학회명
- AVS 2005