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Formation Techniques for Upper Active Channels in Monolithic 3D Integration
- 제목
- Formation Techniques for Upper Active Channels in Monolithic 3D Integration
- 저자
- RINO CHOI
- 학회명
- IEEE Electron Devices Technology and Manufacturing Conference 2024
- 학회 개최일
- 2024-03-03 ~ 2024-03-06