Nano-size grains and high density of 65PMN-35PT thick film for high energy storage capacitor

초록

The energy density in a dielectric can be enhanced by increasing the dielectric constant and electric breakdown field. The breakdown field can be increased by making a high density microstructure with nano-size grains. Nano-size grained ferroelectric 65Pb(Mg1/3Nb2/3))O-3-35PbTiO(3) (65PMN-35PT) thick films for a high energy density capacitor were fabricated by an aerosol-deposition (AD) process. The AD process produced highly dense films with no visual pores. The grain size and crystallinity of the AD films were controlled by changing the annealing temperature. AD films with nano-size grains showed narrow hysteresis and more stored energy than the bulk of the same composition. The AD film annealed at 500 degrees C had an energy density and efficiency of 35 J/cc and 70% at 2000 kV/cm electric field, respectively.

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