Design and fabrication of a curved optical reflector structure

초록

Very large scale integrated (VLSI) micro photonics has been researched recently because of its potential of high data capacity and small form factor. VLSI microphotonic device expands its information capacity by way of integrating optical, photonic and optoelectronic devices in a single chip or substrate of small size. To achieve high integration capacity in a small size substrate, a non-planar optical reflector is important. Curved reflector structures have relatively large alignment tolerance and high reflectance, compared with other reflector structures like 45 degree mirrors or metal assist reflectors. But, the curved shape reflectors are not easy to fabrication, and requires precise decision of the curvature of the curved shape to improve its performance. This paper shows a simple demonstration of a curved shape, non-planar optical reflector and its alignment characteristics. Fabricated optical reflector showed good vertical optical reflections, and ~1.5 dB loss was measured within 20 μm range of vertical and horizontal misalignments.