ScholarWorks@인하대학교

상세 보기

Fabrication of PZT films for MEMS Based piezoelectric Micromachined Ultrasonic Transducer (pMUT) by Using granule spary in vacuum method

제목
Fabrication of PZT films for MEMS Based piezoelectric Micromachined Ultrasonic Transducer (pMUT) by Using granule spary in vacuum method
저자
JEONG DAE YONG
학회명
IWPMA & ECMD2016

ScholarWorks@인하대학교

22212 인천광역시 미추홀구 인하로 100 정석학술정보관 Tel. 032-860-9003

COPYRIGHT © 인하대학교 All Rights Reserved.

Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.

You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.