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초록
In this paper, the nano-grating was measured by Scanning Probe Microscopy (SPM) system using digital Proportion, Integration and Derivative (PID) control. Through this measurement, we could confirm the improvement of the vertical resolution compared with analog Proportion and Integration (PI) control method.
- 제목
- Digital PID Control을 적용한 Scanning Probe Microscopy의 Nano-grating 측정
- 제목 (타언어)
- The Measurement of Nano-grating by Scanning Probe Microscopy Using Digital PID Control
- 저자
- LEE SEUNG GOL
- 학회명
- 한국광학회 2008년도 하계학술발표회
- 개최지
- 휘닉스파크
- 학회 개최일
- 2008-07-10 ~ 2008-07-11