고주파 플라즈마 CVD에 의한 초경합금상에 다이아몬드 박막의 합성

초록

Diamond thin films were synthesized on WC-Co substrate at various experimental parameters using 13.56MHz RF PACVD(radio frequency plasma-assisted chemical vapor deposition). in order to increase the nucleation density, the WC-Co substrate was polished with 3um diamond paste. And the WC-Co substrate was pretreated in HNO3:H2O = 1:1 and O2 plasma. In H2-CH4 gas mixture, the crystallinity of thin film increased with decreasing CH4 concentration at 800W discharge power and 20torr reaction pressure. In H2-CH4-O2 gas mixture, the crystallinity of thin film increased with increasing O2 concentration at 800W discharge power, 20torr reaction pressure and 4% CH4 concentration.