Design and fabrication of temperature-insensitive silicon micro-ring resonator using thermo-optic hybrid polymer

초록

A temperature insensitive silicon micro-ring resonator has been designed and fabricated using thermo-optic organic–inorganic hybrid materials synthesized by non-hydrolytic sol–gel processing. The positive thermo-optic coefficient (TOC) of the silicon micro-ring resonator is compensated by the negative TOC of the polymer cladding. This results in nearly zero effective TOC of the silicon microring resonator. For this, the waveguide width of the silicon micro-ring resonator is calculated by varying the TOC of the polymer cladding at a given waveguide height. The silicon micro-ring resonator is designed to be temperature-insensitive for both the transverse-electric (TE) and –magnetic (TM) modes simultaneously. The spectral response of the designed resonator is calculated for the temperature range between 273K and 373K using a 3-dimesional finite difference time domain method. The wavelength shift for the TE and TM modes in the resonator is found to be ~5pm/K for various waveguide dimensions.