Structural and Optical Characteristics of Nanoporous Silicon with Various Etching and Oxidation Conditions

초록

We investigated the nanostructural and optical features of p-type NPS. Samples were prepared by anodic etching techniques in HF solutions, depending on various process parameters, including etching time, aging time and thermal treatment. The surface morphology, optical, structural and chemical features of the NPS were investigaed by SEM, TEM, spectrofluorophotometer(PL), BET, HRXRD, FT-IR spectroscopy, XPS and AES in this study. The physical-chemical characteristics of the NPS associated with the observed PL variation were examined in detail in terms of crystallographic and oxidation variations.