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초록
As the concern about global warming id rapidly growing, emission of greenhouse gases...... PFCs, mainly used in semiconductor industries, are mostly chemically inert and noncorrosive gases ...................................
- 제목
- Decomposition of PFCs using gliding arc plasma
- 저자
- DONG WHA PARK
- 학회명
- 9th Asian-Pacific Conference on Plasma Science and Technology(APCPST-9)
- 개최지
- Hwangshan
- 학회 개최일
- 2008-10-08 ~ 2008-10-11