Multi-functional Sensor Application Methods based on Suspended 2D van der Waals Materials

초록

Van der Waals (vdWs) two-dimensional (2D) nanomaterials have been attracted much attention for the most promising candidate materials due to their outstanding physical and electrical properties. Among the many research topics, a sensor application is one of the most significant key techniques for biomedical, human healthcare, and environmental monitoring in the near future. In this study, we demonstrate a multi-functional smart sensor device consisting of a single transition metal dichalcogenides (TMDCs) nanomaterial for biomedical (ultrasound), human healthcare (pressure), and environmental (gas molecules) monitoring systems. For the device fabrication, two separated ITO electrodes were prepared on a glass substrate with a five μm distance. Since the adhesion force between the 2D material and the ITO electrode was poor, graphene electrodes were firstly located and used as adhesive buffer layers at each ITO electrode. After then, a 2D material was attached to form a suspended sensing site for sound, pressure, and gas exposure as well. From the suspended structure, 2D sensing material was fully opened and exposed to a variety of external stimuli, such as sound (vibration energy), pressure (kinetic energy), gas (chemical energy) and so on. From this approach, we successfully achieved suspended MoS2 channel-based acoustic sensor applications for real-time current and voltage signals measurements to evaluate sensing abilities. MoS2 is a well-known material that has piezoelectric properties; therefore, the suspended channel will generate the electrical signals by repeating stretching and compressing movements according to the applied ultrasound acoustic wave (frequency). More details (pressure and gas detection) will be discussed in the meeting.