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Effect of Electrical Substrate-biases on the Nanostructural and Physical Properties of nc-Si:H Thin Films Prepared by PECVD

  • CHO NAMHEE
제목
Effect of Electrical Substrate-biases on the Nanostructural and Physical Properties of nc-Si:H Thin Films Prepared by PECVD
저자
CHO NAMHEE
학회명
ICMAP 2012 The 4th International Conference on Microelectronics and Plasma Technology

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