Effect of current density and aging conditions on the structural and optical features of nanoporous silicon

  • CHO NAMHEE

초록

In this study, nanoporous silicon was prepared by electrochemical anodic etching of p-type silicon wafer in a solution of HF, C2H5OH, and H2O. The nanostructural, optical, and chemical features of NPS were investigated in terms of various process parameters such as current density and etching time.

제목
Effect of current density and aging conditions on the structural and optical features of nanoporous silicon
저자
CHO NAMHEE
학회명
The 11th Seoul International Symposium on the Physics of Semiconductors and Applications