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초록
In this study, nanoporous silicon was prepared by electrochemical anodic etching of p-type silicon wafer in a solution of HF, C2H5OH, and H2O. The nanostructural, optical, and chemical features of NPS were investigated in terms of various process parameters such as current density and etching time.
- 제목
- Effect of current density and aging conditions on the structural and optical features of nanoporous silicon
- 저자
- CHO NAMHEE
- 학회명
- The 11th Seoul International Symposium on the Physics of Semiconductors and Applications