Optical and structural properties of multi-period low-emissivity filters by RF magnetron sputtering

초록

Multi-period low-emissivity(low-e) filters based on the basic structure of [TiO2|Ti|Ag|TiO2] were designed and fabericated by a RF magnetron sputtering method. The optical performance of the filters was examined by the measurement of transmittance and reflectance with a spectrophotometer. Also, the structural, chemical, and electrical properties were investigated by the scanning electron microscopy (SEM), Auger electron spectroscopy (AES), Rutherford backscattering spectrometry(RBS), and the four-point probe method.