Nano-Linear Motor Based on Self-Moving Cell Concept

초록

A state-of-the-art of linear motor based on self-moving cell concept is described in this paper. The self-moving cell concept enables simple structure of the proposed motor and presents advanced performances in terms of high thrust and stall force, high stillness with no energy input and two operational modes for macro and micro motion as well as continuous linear motion from sub-micron to nano order resolution. The cell of a self-moving cell linear motor (SCLM) consists of three bows in the form of an oval shaped shell structure and a stacked piezoceramic actuator inside. By activating each actuator in three cells in turn, the cell train moves forward or backward along a guideway. Therefore the SCLM can achieve a long travelling range with variable speed by changing activation frequency and can generate a nano resolution by controlling the voltage of the first cell. The design, operation principle and performance test of the motor will be presented. Also, the tracking control characteristics are investigated with simple PID controller.