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Minimized atomistic model (MAM) of BmIn cluster and the effect of Ge pre-amorphization implant (Ge-PAI) on boron diffusion

  • WON TAEYOUNG
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Minimized atomistic model (MAM) of BmIn cluster and the effect of Ge pre-amorphization implant (Ge-PAI) on boron diffusion
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WON TAEYOUNG
학회명
2006 NSTI Nanotechnology Conference and Trade Show

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