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Optimization of 450mm Wafer Ashing Chamber by Computational Fluid Dynamics Simulation

  • PARK SEGEUN
제목
Optimization of 450mm Wafer Ashing Chamber by Computational Fluid Dynamics Simulation
저자
PARK SEGEUN
학회명
International Conference on Materials and Products Manufacturing Technology(MPMT 2013)
개최지
Changsha
학회 개최일
2013-09-25 ~ 2013-09-26

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