Fabrication of semiconductor photonic band-gap crystal slabs for THz wave by a femtosecond laser abalation

초록

Semiconductor photonic bandgap crystal slabs with air holes were designed and fabricated on Si and GaAs substrates by a laser ablation. 20*20 spuare lattice photonic bandgap crystal slabs with the period of 75um(a) and diameter of 50um(0.33a) were designed. A generative Ti;sapphire laser with 1 KHz repletion, 800nm in the central wavelength, and 150 fs in the pulse width was used to fabricate the two dimensional photonic bandgap crystals by drilling air holes on Si and GaAs substrates. The micro-Structural change with varying irradiation power and time was investigated using scanning electron microscopy