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Dependence of the structural and optical properties of ZnO thin films on the substrate temperature in atomic layer deposition and post annealing

  • CHONGMU LEE
제목
Dependence of the structural and optical properties of ZnO thin films on the substrate temperature in atomic layer deposition and post annealing
저자
CHONGMU LEE
학회명
1st International Symposium on Functional Materials

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