UV embossing lithography를 이용한 다중모드간섭 광분배기 제작

초록

We present in this paper the technology of UV embossing lithography as a flexible, low-cost microfabrication method for optical waveguide devices. By using the fabricated UV embossing lithography stamper, the polymer 1XN MMI optical power splitter could be successfully replicated on the glass. The shapes of replicated waveguide device were good agreement with the master pattern with photoresist.