Conduction mechanism of Metal-Oxide-Semiconductor Field Effect Transistor with La-incorporated Hf based dielectric

제목
Conduction mechanism of Metal-Oxide-Semiconductor Field Effect Transistor with La-incorporated Hf based dielectric
저자
RINO CHOI
학회명
International Conference on Microelectronics and Plasma Technology 2014
학회 개최일
2014-07-08 ~ 2014-07-11