진공증착중합법을 이용한 6FDA/4-4' DDE 폴리이미드 박막의 열경화 온도에 따른 특성(Ⅱ)

초록

In this paper, thin films of PI were fabricated VDPM of dry processes which are easy to control the film's thickness and hard to pollute due to volatile solvents. From FT-IR, PAA thin films fabricated by VDP were changed to PI films by thermal curing. From SEM, AFM and Ellipsometer experimental, as the higher curing temperatures, the films thickness decreases and reflectance increases. Therefore, PI could be fabricated stable by increasing curing temperature.