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펄스레이저 증착법으로 성장된 ZnO 박막의 어닐링 온도변화에 따른 구조적, 광학적 특성에 관한 연구
Annealing Effect on the structual and optical properties of ZnO thin films prepared by Pulsed Laser Deposition
초록
ZnO thin films on (001) sapphire substrates have been deposited by pulsed laser deposition(PLD) technique using an Nd:YAG laser with a wavelength of 266 ㎚. During deposion, the experiment of the deposition of ZnO thin films has been performed for substrate temperatures in the range of 400 ℃ and flow rate of 350 sccm, films have been annealed at various substrate temperatures after deposition. After post-annealing treatment in the oxygen ambient, the structural properties of ZnO thin films were characterized bydiffraction (XRD), SEM and the optical of the ZnO were characterized by photoluminescence (PL)
- 제목
- 펄스레이저 증착법으로 성장된 ZnO 박막의 어닐링 온도변화에 따른 구조적, 광학적 특성에 관한 연구
- 제목 (타언어)
- Annealing Effect on the structual and optical properties of ZnO thin films prepared by Pulsed Laser Deposition
- 저자
- CHEON LEE
- 학회명
- 2004년도 대한전기학회 전기물성 및 응용부문회 추계학술대회