Dependence of electrical and optical properties of the Al doped ZnO for transparent conductors deposited by rf-Magnetron sputtering on the O2/Ar gas flow ratio

  • CHONGMU LEE
제목
Dependence of electrical and optical properties of the Al doped ZnO for transparent conductors deposited by rf-Magnetron sputtering on the O2/Ar gas flow ratio
저자
CHONGMU LEE
학회명
High performance ceramicsⅣ