Fabrication of Thermo-optic Tunable Filters for WDM application

초록

In this paper, we fabricated a thermo-tunable filter using bulk micromachining of MEMS and analyzed the transmittance characteristic, as integrated micro component on the micro-bench. Tunable filter is designed using Fabry-Perot interference effect. We utilize thermo-optic effect of multi-layers whose refractive indexes are changed by temperature variation effect, to tune transmitted wavelength.