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Dependence of electrical and optical properties of the Al doped ZnO for transpatent conductors on the O2/Ar gas flow ratio in rf-magnetron sputtering

  • CHONGMU LEE
제목
Dependence of electrical and optical properties of the Al doped ZnO for transpatent conductors on the O2/Ar gas flow ratio in rf-magnetron sputtering
저자
CHONGMU LEE
학회명
The Fourth China International Conference on High-Performance Cermics

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