감광성 폴리이미드를 이용한 MMI 구조의 편광분리기 제작

초록

A waveguide polarization splitter based on the multimode interference effect and the birefringence of the photodefinable polyimide material is proposed and fabricated. The extinction ratios of the fabricated polarization splitter were measured 11.07 dB and 13.44 dB for TE and TM polarizations, respectively. The birefringence of the photodefinable polyimide could be controlled from 0.011 to 0.024 according to the film preparation conditions.