Dependence of the crystallinity, surface roughness, carrier concentration and carrier mobility of ZnO:Al thin films on the O2/Ar gas flow ratio in RF sputtering
CHONGMU LEE
제목
Dependence of the crystallinity, surface roughness, carrier concentration and carrier mobility of ZnO:Al thin films on the O2/Ar gas flow ratio in RF sputtering
저자
CHONGMU LEE
학회명
1st International Symposium on Functional Materials