Sm-Fe 박막MEMS 작동기의 유한요소해석을 위한 자기변형 실험

초록

In this study, Sm-Fe thin films which have 1000Å thickness are fabricated by DC magnetron sputtering and then measured their modulus of elasticity and magnetostriction to verify developed finite element model. Sm-Fe thin films are prepared by DC magnetron sputtering method in the composition of SmxFe1-x (x = 0.4). The Ar gas pressure below 1.210-9 Torr, DC input power of 100W are used for the sputtering conditions. During sputtering process the substrate holder is heated up to 300°C. The thin films are deposited to a thickness of 1000Å on Si substrate with a thickness of 50m. The fabricated microstructures are observed by X-ray diffraction (XRD) and the film thickness is measured by using a Ellipsometer. And moduli of elasticity of the films are also measured from nanoindentation. The compositions of sputtered thin films are obtained by energy dispersive spectroscopy (EDS). Magnetostrictions are determined from the curvature of the thin films which are measured by the optical cantilever method. The experimental results are discussed with numerical data.