Fabrication of grating structures by AFM nano-lithography

  • PARK SEGEUN

초록

Recently, nanotechnologies have been obtained good results in many research areas, such as materials [1], devices [1], and fabrication technologies

제목
Fabrication of grating structures by AFM nano-lithography
저자
PARK SEGEUN
학회명
35th International Conference on Micro and Nano Engineering 2009