Design and fabrication error analysis of input couplers for integrated micro-optic systems by rigorous diffraction theory

초록

Two-way input couplers with high spatial frequency are designed by applying the rigorous diffraction theory based on the coupled wave approach and their fabrication errors are analyzed numerically also. Though the similar work was performed in order to design high spatial frequency gratings for beam splitters and beam deflectors, the rigorous diffraction theory based on the modal theory was applied.