plasma resistance characterization of y-si-al-o-n glass

  • KIM HYUNG SUN
제목
plasma resistance characterization of y-si-al-o-n glass
저자
KIM HYUNG SUN
학회명
International Symposium on New Frontier of Adcanced Si-based ceramic and composites
개최지
Hyatt hotel, jeju
학회 개최일
2008-06-08 ~ 2008-06-11