Observation of Scattering Effect on Carrier Mobility of MOSFET with La-incorporated-HfO2 Gate Dielectric

제목
Observation of Scattering Effect on Carrier Mobility of MOSFET with La-incorporated-HfO2 Gate Dielectric
저자
RINO CHOI
학회명
International Conference on Solid State Devices and Materials 2013 (SSDM 2013)