Chromatic dispersion measurement of nano-silicon waveguides using a white-light interferometry method

초록

We report a white-light Mach-Zehnder interferometry method for an accurate measurement of spectral distribution of the chromatic dispersion coefficient of very short optical waveguides over a wavelength range of 1520∼1560 nm. The chromatic dispersion curve of a 7.6 mm long silicon nano-waveguide of 400 nm width and 250 nm height was successfully measured by confirming the method with standard single-mode fibers up to 3 cm length, for which its total chromatic dispersion is as small as 0.51 fs/nm. This method will be very useful for determination of chromatic dispersion profile of compact nanowaveguide devices.