1,3 Propanediol 을 이용한 PZT(30/70) Thick Film 의 전기적 및 강유전 특성에 관한 연구

초록

We evaluated structural and electric, ferroelectric properties of PZT(30/70) thick film which was prepared by using 1,3 propanediol-based Sol-gel method on Pt/Ti/SiO2/Si substrates. Heat treatment process is used Rapid thermal annealing(RTA) to reduce a thermal stress, finally annealing is processed at 650 ℃ by furnace. As the result of SEM analysis, we got 350 ㎚ in thickness for one coating and 1 ㎛ for three times of coating. In the results of C-D analysis at 1 kHz, dielectric constant(εr) and dissipation factor were 1823 and 0.03 respectively. C-V curve shaped as like a symmetrical butterfly. Leakage current density at 200 kV/㎝ was 1.25×10-5 A/㎝ and in the results of hysteresis loops measured at 150 kV/㎝, the remnant polarization(Pr) and the coercive field(Ec) are 33.8 μC/㎠ and 56.9 kV/㎝, respectively. The prepared PZT(30/70) thick film exhibited good ferroelectric, electric properties