Shear-force Microscopy를 이용한 액체 내 나노 시료의 형상 측정

초록

In this paper, the surface profile of a saw-filter immersed in a liquid was measured by shear-force microscopy system. The gap between the probe tip of the system with the sample surface was accurately controlled by maximizing Q-value of the dithering probe in a liquid. It was observed that the nano-scale height variation of the sample could be successfully measured by our system.