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Impact of Flash Annealing on Performance and Reliability of High-κ/Metal-Gate MOSFETs for sub-45nm CMOS
- 제목
- Impact of Flash Annealing on Performance and Reliability of High-κ/Metal-Gate MOSFETs for sub-45nm CMOS
- 저자
- RINO CHOI
- 학회명
- 2007 IEEE International Electron Devices Meeting