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Kinetic Monte Carlo Study on the Suppression of Boron Transient Enhanced Diffusion with Carbon Pre-implant

  • WON TAEYOUNG
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Kinetic Monte Carlo Study on the Suppression of Boron Transient Enhanced Diffusion with Carbon Pre-implant
저자
WON TAEYOUNG
학회명
Nano Korea 2010
개최지
일산 KINTEX Room 212
학회 개최일
2010-08-17 ~ 2010-08-20

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