Patterning of Carbon nanotubes and PEDOTPSS Composite Films for Transparent Electrodes by spray lift-off process

초록

In recent years, Carbon nanotubes (CNTs) have been widely studied as low cost electrode materials for electronic devices, such as photovoltaic cells or light emitting diodes (LED) to improve the device performance. However, patterning of CNTs is difficult by the conventional methods of photolithhography and etching, which have contamination problems in the etched region. Several studies have been reported that CNTs are patterned by lift-off technique. However, using photoresist in the lift-off technique also has another problem of chemical attack, when patterned photoresit is removed by solvent deposited CNT layer is also attacked.