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Kinetic Monte Carlo (kMC) Study on Carbon Trapping Effect in Pre-amorphized Silicon

  • WON TAEYOUNG
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Kinetic Monte Carlo (kMC) Study on Carbon Trapping Effect in Pre-amorphized Silicon
저자
WON TAEYOUNG
학회명
International Conference on Advanced Electromaterials 2011
개최지
Ramada Plaza Jeju Hotel
학회 개최일
2011-11-07 ~ 2011-11-10

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