Comb Type TbDyFeNi Thin Film Actuators for Micromachined Wireless Optical Mirror System

제목
Comb Type TbDyFeNi Thin Film Actuators for Micromachined Wireless Optical Mirror System
저자
CHO CHONG DU
학회명
Asia Pacific Conference on Optics Manufacture 2007 (APCOM 2007)