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초록
Nano-sized silicon carbide particle was prepared by dc plasma jet using silicon tetrachloride(SiCl4) and methane(CH4). The synthesized powder was characterized by X-ray diffraction pattern, .................... ...................................................................................................................................
- 제목
- Synthssis of SiC Nano Particles by Plasma Jet
- 저자
- DONG WHA PARK
- 학회명
- 9th APCChE(Asian Pacific Conference of Chemical Engineering) Congress and CHEMECA 2002