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초록
Thin film bulk acoustic wave resonators (FBAR) are composite structures consisting of an electrically excited, thin piezoelectric film supported on a dielectric membrane.
- 제목
- High Frequency AlN Thin Film Acoustic Resonators and Filters Fabricated by RF Plasma on Micromachined Air Gap Si3N4 Membrane
- 제목 (타언어)
- RF 플라즈마에 의한 고주파 AlN 박막공진기 및 필터제조
- 저자
- JEONG WHAN HAN
- 학회명
- Joint International Plasma Symposium of 6th APCPST, 15th SPSM, OS2002 and 11th KAPRA