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초록
We studied plasma etching technique of silicon nirtride layer for silicon photonics devices.
- 제목
- Etching effects of differently deposited silicon nitride for silicon photonics
- 저자
- LEE EL HANG
- 학회명
- ICMAP, The 2nd International Conference on Microelectronics And Plasma technology 2009
- 학회 개최일
- 2009-09-20 ~ 2009-09-25